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Master Bond EP112 is an ultra-low-viscosity, electrically insulating, two-component warmth curable epoxy system designed for demanding purposes requiring optical readability and resistance to chemical compounds generally utilized in silicon processing. This text introduces a two-part case examine involving a microelectronics fabrication, showcasing EP112’s function in bonding a silicon wafer to a glass substrate.
Half 1: The START Course of and EP112’s Position
Within the first a part of this case examine, researchers at Lawrence Livermore Nationwide Laboratory (LLNL) developed an progressive Silicon-on-Insulator (SOI) course of referred to as START (Silicon Switch to Arbitrary Substrate). This technique allows the transformation of ordinary bulk silicon wafers with accomplished circuits into SOI-like configurations with out considerably rising manufacturing prices. By utilizing typical fabrication methods, the START course of combines the advantages of bulk silicon electronics with these of SOI expertise whereas sustaining value effectivity.
A essential step on this course of concerned bonding a silicon wafer to a glass assist substrate. EP112 was chosen because the adhesive of selection as a result of its ultra-low viscosity, sturdy bonding capabilities, and excessive chemical resistance. The bonded construction finally contributed to the profitable improvement of a prototype liquid crystal show (LCD), demonstrating EP112’s effectiveness in microelectronics fabrication.
Half 2: CMOS Wafer Thinning for SEU Resistance
Within the second a part of this examine, LLNL researchers utilized EP112 in a novel wafer-thinning course of to boost the reliability of CMOS-based built-in circuits (ICs). The target was to cut back susceptibility to Single Occasion Upsets (SEUs) by considerably lowering the cost assortment quantity inside the silicon substrate.
To attain this, EP112 was used to bond two substrates collectively, guaranteeing a safe attachment all through the wafer-thinning steps. The method concerned a high-temperature alkaline etching step, the place EP112’s superior chemical resistance performed a vital function in stopping de-bonding. By sustaining structural integrity below these harsh situations, EP112 enabled the profitable completion of the thinning course of, additional demonstrating its suitability for superior semiconductor purposes.
To learn extra about the important thing parameters and necessities, and study in regards to the outcomes, please download the full case study here.
